製程研發部

製程研發部碩士班
Master’s Program 		111~112學年度 113~114學年度起 115學年度起
●通才必修(6學分)
Required Courses		 CSR 5101半導體元件導讀(2) / Introduction to Semiconductor Device (2)
CSR 5301半導體設計導讀(2) / Introduction to Semiconductor Design (2)
CSR 5201半導體材料導讀(2) / Introduction to Semiconductor Material (2)
●專業必修
Required Courses		 CSR 5402製程整合(2) / Process Integration (2) CSR 5402製程整合(2) / Process Integration(2)
CSR 5403半導體微影、RET、Immersion、EUV(3) / Semiconductor Lithography (3)
●專業選修
Elective Courses		 至少選4門(13) / Select at least 4 courses (13) 至少選3門(10) / Select at least 3 courses (10) 至少選3門(10)，AI組-須選修機器學習
/ Select at least 3 courses, AI Division must take Machine Learning (10)
●共同必修(5學分)
Required Courses		 CSR 5001書報討論(二學期共2學分) / Seminar (2 credits over two semesters)
CSR 6000論文研究(0) / Thesis (0)
CSR 5002領導統御(3) / Leadership (3)
●實習學分(3學分)
Elective Courses		 業界實習 / Industry Internship or 實務課程 / Practical Course or 姐妹校交換 / Sister University Exchange
畢業總學分數
Total Credits		 29學分(29 credits)
*( )內之數字為須修習學分數。
*請新生於入學申請抵免前，詳閱辦法與說明且必修課程皆不可用跨單位學分抵免。
*請碩班生於跨單位修課前，提出申請表並依須知辦理（含入學時學分抵免）碩生至多認列 6 學分為專業選修。
*申請姊妹校交換資格前，請洽詢院辦學分認列之適用方式。
* The number in parentheses ( ) indicates the required credits.
* New students must carefully read the regulations and instructions before applying for credit transfer upon admission. Required courses cannot be waived or substituted with inter-unit credits.
* Master’s students must submit an application form and follow the guidelines before taking inter-unit courses (including credit transfers upon admission). Up to 6 credits may be recognized as professional electives.
* Before applying for eligibility to participate in a sister university exchange program, please consult the college office regarding the applicable rules for credit recognition.
製程研發部博士班
Ph.D. Program 		111學年度 112~113學年度 114學年度起
●通才必修(6學分)
Required Courses		 CSR 5101半導體元件導讀(2) / Introduction to Semiconductor Device (2)
CSR 5301半導體設計導讀(2) / Introduction to Semiconductor Design (2)
CSR 5201半導體材料導讀(2) / Introduction to Semiconductor Material (2)
●專業必修
Required Courses		 CSR 5402製程整合(2) / Process Integration(2)
CSR 5403半導體微影、RET、
Immersion、EUV (3) / Semiconductor Lithography (3)
●專業選修
Elective Courses		 至少選2門(6) / Select at least 2 courses (6) 至少選3門(9) / Select at least 3 courses (9) 至少選1門(4) / Select at least 1 course1 (4)
●共同必修(5學分)
Required Courses		 CSR 5001書報討論(2學期共2學分)
/ Seminar (2 credits over two semesters)
CSR 8000論文研究(0) / Thesis (0)
CSR 5002領導統御(3) / Leadership (3) 		CSR 7002專題討論(2學期共2學分)
/ Colloquium (2 credits over two semesters)
CSR 8000論文研究(0) / Thesis (0)
CSR 7003企業領導(3) / Executive Leadership (3)
●實習學分(3學分)
Elective Courses		 業界實習 / Industry Internship or 實務課程 / Practical Course or 姐妹校交換 / Sister University Exchange
畢業總學分數
Total Credits		 20學分 (20 credits) 23學分 (23 credits)
*( )內之數字為須修習學分數。
*請新生於入學申請抵免前，詳閱辦法與說明且必修課程皆不可用跨單位學分抵免。
*請博班生於跨單位修課前，提出申請表並依須知辦理（含入學時學分抵免）博生至多認列 9 學分為專業選修。
*碩升博生已修過通才必修者，請洽詢院辦免修申請方式。
*申請姊妹校交換資格前，請洽詢院辦學分認列之適用方式。
* The number in parentheses ( ) indicates the required credits.
* New students must carefully read the regulations and instructions before applying for credit transfer upon admission. Required courses cannot be waived or substituted with inter-unit credits.
* Doctoral students must submit an application form and follow the guidelines before taking inter-unit courses (including credit transfers upon admission). Up to 9 credits may be recognized as professional electives.
* Master’s students advancing to the doctoral program who have already completed the general required courses should consult the college office regarding the procedure for exemption.
* Before applying for eligibility to participate in a sister university exchange program, please consult the college office regarding the applicable rules for credit recognition.
製程研發部逕讀博士學位
Direct-Entry Ph.D. 		111學年度 112學年度 113學年度起
●通才必修(6學分)
Required Courses		 CSR 5101半導體元件導讀(2) / Introduction to Semiconductor Device (2) CSR 5301半導體設計導讀(2) / Introduction to Semiconductor Design (2) CSR 5201半導體材料導讀(2) / Introduction to Semiconductor Material (2)
●專業必修
Required Courses		 CSR 5402製程整合(2) / Process Integration (2) CSR 5402製程整合(2) / Process Integration(2) &
CSR 5403半導體微影、RET、Immersion、
EUV(3) / Semiconductor Lithography (3)
●專業選修
Elective Courses		 至少選6門(19) / Select at least 6 courses (19) 至少選5門(16) Select at least 5 courses (16)
●共同必修(5學分)
Required Courses		 CSR 5001書報討論(2學期共2學分)
/ Seminar (2 credits over two semesters)
CSR 8000論文研究(0) / Thesis (0)
CSR 5002領導統御(3) / Leadership (3)		 CSR 7002專題討論(2學期共2學分)
/ Colloquium (2 credits over two semesters)
CSR 8000論文研究(0) / Thesis (0)
CSR 7003企業領導(3) / Executive Leadership (3)
●實習學分(3學分)
Elective Courses		 業界實習 / Industry Internship or 實務課程 / Practical Course or 姐妹校交換 / Sister University Exchange
畢業總學分數
Total Credits		 35學分 (35 credits)
*( )內之數字為須修習學分數。
*請新生於入學申請抵免前，詳閱辦法與說明且必修課程皆不可用跨單位學分抵免。
*請博班生於跨單位修課前，提出申請表並依須知辦理（含入學時學分抵免）博生至多認列 9 學分為專業選修。
*申請姊妹校交換資格前，請洽詢院辦學分認列之適用方式。
* The number in parentheses ( ) indicates the required credits.
* New students must carefully read the regulations and instructions before applying for credit transfer upon admission. Required courses cannot be waived or substituted with inter-unit credits.
* Doctoral students must submit an application form and follow the guidelines before taking inter-unit courses (including credit transfers upon admission). Up to 9 credits may be recognized as professional electives.
* Before applying for eligibility to participate in a sister university exchange program, please consult the college office regarding the applicable rules for credit recognition.

課程資訊表:

領域(中英文) 課程名稱(中英文) 授課老師 課程科號 學分 必/選修 開課系所 課程屬性 開課學期
元件 Device 半導體元件導論(Eng)
Introduction to Semiconductor Device		 白田理一郎/張鑑元 CSR 5101 2 通才必修 CSR 研究所 上
設計 Design 半導體設計導論(Eng)
Introduction to Semiconductor Design		 劉靖家、謝志成、
黃稚存、黃朝宗		 CSR 5301 2 通才必修 CSR 研究所 上
材料 Material 半導體材料導論(Eng)
Introduction to Semiconductor Material		 廖建能 CSR 5201 2 通才必修 CSR 研究所 上
蝕刻與薄膜製程技術
Etching and Thin Film Technologies		 化學機械研磨製程
Chemical Mechanic Polish Process		 黃健朝 CSR 5410 2 選 CSR 研究所 下
先進半導體技術
Advanced Technologies for Semiconductor and Display		 王寶琪(AMAT) MS 5406 3 選 材料系 研究所 下
微波工程(Eng)
Microwave Engineering		 柳克強 ESS 5271 3 選 工科系 研究所 下
離子體物理
Plasma Physics		 張存續 PHYS 5350 3 選 物理系 研究所 下
薄膜工程導論
Introduction to thin film engineering		 黃嘉宏 ESS 4520 3 選 工科系 研究所 上
半導體晶圓清洗製程及不良粒子控制技術
Semiconductor cleaning process and defect reduction technology		 TBD CSR 5411 2 選 CSR 研究所 TBD
半導體化學品材料與製程應用
Chemical Material and Process Application in Semiconductor		 李宏仁 CSR 5414 2 選 CSR 研究所 上
半導體薄膜沉積技術(Eng)
Semiconductor Thin Film Deposition Techniques		 李愷信 CSR 54xx 3 選 CSR 研究所 下
電漿蝕刻原理及製程技術(Eng)
Plasma Etching Principal and Process Technology		 馬紹銘 CSR 54xx 3 選 CSR 研究所 下
原子級製程技術
Atomic-Level Process Technology		 沈昌宏 TBD 3 選 CSR 研究所 TBD
微影製程技術
Lithography Technologie		 半導體微影、RET、Immersion、EUV(Eng)
Semiconductor Lithography		 林本堅 CSR 5403 3 必/選 CSR 研究所 上
光學鄰近修正
Optical Proximity Correction		 高蔡勝 CSR 5404 2 選 CSR 研究所 下
微影、蝕刻、鍍膜、清洗、製程設備與控制
Litho Process & Control, scanner,
track, metrology, Deposition, Etching, Cleaning		 洛彼得(TEL)、
陳俊光 (ASML)		 CSR 5405 3 選 CSR 研究所 下
微影光罩
Lithography Mask		 高蔡勝 CSR 6401 2 選 CSR 研究所 上
極紫外光微影原理(Eng)
Principles of Extreme-Ultraviolet Lithography		 嚴濤南(ASML) CSR 5406 2 選 CSR 研究所 下
製程整合及應用技術
Process Integration and Applied Technologies		 製程整合
Process Integration		 張守仁
(PSMC)		 CSR 5402 2 必 CSR 研究所 下
先進半導體製程測量
Introduction of Metrology for Advanced Semiconductor Process Control		 趙強
(KLA)		 CSR 5408 3 選 CSR 研究所 下
材料化學分析技術 (Eng)
Analytical techniques for Materials Chemistry		 楊家銘 CHEM 5430 3 選 化學系 研究所 上
電子封裝力學概論(Eng)
Fundamental Mechanics of Electronic Packaging		 江國寧 PME 6343 3 選 動機系 研究所 下
奈米世代封裝技術
Packaging for Nanoelectronics		 余振華(TSMC)/余國寵(TSMC) CSR 5407 2 選 CSR 研究所 下
先進半導體製程技術
Introduction of advanced semiconductor process technology		 沈昌宏 CSR 5413 3 選 CSR 研究所 下
半導體製造之製程監控和品質改善技術
Process monitoring and quality improvement technology in semiconductor manufacturing		 李宏仁 CSR 54xx 2 選 CSR 研究所 TBD
扇出型晶圓級封裝
Fan-Out Wafer-Level Packaging		 劉重希 CSR 54xx 3 選 CSR 研究所 TBD
人工智慧與半導體製造－推薦學習課程
Recommended Courses on AI and Semiconductor Manufacturings		 機器學習
Machine Learning		 孫 民 EE 6550 3 (AI組)
必選一		 電機系 研究所 下
圖形識別
Pattern Recognition		 許秋婷 CS 5540 3 選 資工系 研究所 下
人工智慧倫理、法律與社會
AI Ethics, Law and Society		 賴尚宏 CS 5605 3 選 資工系 研究所 上
人工智慧與藝術導論(Eng)
Introduction to Artificial Intelligence and Arts		 吳中浩 CS 5604 3 選 資工系 研究所 下
影像處理
Image Processing		 林嘉文 EE 6630 3 選 電機系 研究所 TBD
深度學習
Deep Learning		 吳尚鴻 CS 5656 3 選 資工系 研究所 上
深度增強式學習
Deep Reinforcement Learning		 李濬屹 CS 5657 3 選 資工系 研究所 下