Faculty of Process Department
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Dean of CoSR Distinguished Research Chair Professor Burn. J. Lin |
Education： Ph.D., Ohio State University Research Areas： Electromagnetic wave, photoelectric, electronic and electrical engineering Email：burnlin@ee.nthu.edu.tw Website：連結 |
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Director of Process Department CoSR Distinguished Professor Sheng Kao-Tsai
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Education： Ph.D., National Tsing Hua University Research Areas： OPC, Mask Technology, Semiconductor Lithography Technology
Email：tsaisheng_kao@mx.nthu.edu.tw |
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Distinguished Professor Vice President for Research and Development, NTHU Po-Wen Chiu |
Education： Ph.D., Technical University of Munich Research Areas： 2D materials, Nanoelectronics, Low-dimensional physics, Quantum bits Email：pwchiu@ee.nthu.edu.tw |
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Chair Professor Chih-Huang Lai |
Education：
Research Areas： Email：chlai@mx.nthu.edu.tw
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Professor K.C. Leou |
Education： Ph.D., University of California, Los Angeles Research Areas： Plasma Processing, Plasma Physics, Nano-Technology, Microwave Engineering, Flat Panel Display Email：kcleou@ess.nthu.edu.tw |
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Professor Chairman, Department of Physic Keh-Chyang Leou |
Education： Ph.D., National Tsing Hua University Research Areas： 1.4H-SiC Semiconductor Processes Email：thschang@phys.nthu.edu.tw |
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Jointly Appointed Professor Senior Vice President, Tokyo Electron Taiwan Ltd. Dr. Peter Loewenhardt |
Education： Research Areas： Email：peter.loewenhardt@tel.com |
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Professor Chia-Min Yang
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Education： Ph.D., National Tsing Hua University Research Areas： Physical Chemistry, Materials Chemistry, Heterogeneous Catalysis Email：cmyang@mx.nthu.edu.tw |
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Professor Fan-Yi Ouyang |
Education： Ph.D., University of California, Los Angeles Research Areas： Microelectronic materials and processing, Thin film deposition and characterization, Mass transport (diffusion) and interfacial reaction, Electromigration, Thermomigration, and Stress migration, Pb-free solders and Cu interconnect Email：fyouyang@ess.nthu.edu.tw |
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Researcher/Jointly appointed Professor U-Ser Jeng |
Education： Ph.D., U. Rhode Island Research Areas： X-ray and Neutron scattering applications / small- and wide-angle X-rays scattering instrumentation, Solution structures of biological macromolecules and hierarchical structures of self-assembly and biotextures, Nanostructures and crystallization of polymers and photovoltaic thin films Email：usjeng@nsrrc.org.tw |
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Distinguished Professor Jia-Hong Huang |
Education： Ph.D., University of Illinois at Urbana-Champaign Research Areas： Email：jhhuang@ess.nthu.edu.tw |
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Jointly Appointed Professor Anthony Yen |
Education： Research Areas： Email：tony.yen@asml.com |
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Jointly Appointed Professor Assistant Vice President, ASML Zun-Guang Chen |
Education： Ph.D., National Tsing Hua University
Research Areas： Email：ck.chen@asml.com |
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Industry/Adjunct Professor TSMC Distinguished Fellow, Vice President Chen-Hua Yu |
Education： Research Areas： Email：chyu@tsmc.com |
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Professor Hsing-Yu Tuan
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Education： Ph.D. The University of Texas at Austin Research Areas： Electrochemical batteries, Design and application of nanomaterials Email：hytuan@che.nthu.edu.tw |
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Adjunct Professor SPIE Fellow, Senior Researcher at NML Yi-sha Ku |
Education： Ph.D., National Tsing Hua University Research Areas： Semiconductor Metrology Technology, Electromagnetic theoretical model, Scatterometry analysis algorithm Email：yku@itri.org.tw |
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Professor
Chao-Hui Yeh |
Education： Ph.D., National Tsing Hua University Research Areas： 2D nanotransistor/heterostructures and non-volatile RRAM technology Email：chyeh@ee.nthu.edu.tw |
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Professor Vice President for Global Affairs NTHU, SPIE Fellow Ta-Jen Yen |
Education： Ph.D., University of California, Los Angeles Research Areas： Email：tjyen@mx.nthu.edu.tw |
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NTHU Chair Professor Kuo-Ning Chiang |
Education： Ph.D., Georgia Institute of Technology Research Areas： Advanced Microsystem Packaging, MEMS/NEMS Design, Nano-Mechanics and Nano-Structure Analysis, Artificial Intelligence Methods, Computational Solid Mechanics, Nonlinear Finite Element Method and Contact/Crash Analysis. Email：knchiang@pme.nthu.edu.tw |
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Distinguished Professor Yu-Lun Chueh |
Education： Ph.D., National Tsing Hua University Research Areas： Introduction to Material Science and Engineering, Introduction to Solid-State Physic, Electron Microscopy
Email：ylchueh@mx.nthu.edu.tw |
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Jointly Appointed Professor Vice Prsident of R&D, PSMC Shou-Zen Chang |
Education： Ph.D., National Taiwan University Research Areas：
Email：szchang@powerchip.com |
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Chang-Chun Lee |
Education： Ph.D., National Tsing Hua University Reseasrch Areas： Mechanical Designs and Integrations of 3D IC System, Back-End of Line (BEOL) Process Enhancement and Reliability Investigation of Nano-Micro Devices, Strain Silicon Engineering, Advanced Microsystem Packaging, Computational Solid Mechanics, Thin Film Mechanics, Coupled-Field Nonlinear Finite Element Analysis Email：cclee@pme.nthu.edu.tw |
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Associate Professor ChangHua Liu
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Education： Research Areas： Email：changhua@gapp.nthu.edu.tw |
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Professor Chang-Hong Shen |
Education： Ph.D., National Tsing Hua University Research Areas： Email：chshen@narlabs.org.tw |
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Industry/Adjunct Professor Qiang Jimmy Zhao |
Education： Research Areas： Email：Qiang.zhao@kla.com |
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Professor Kai-Shin Li |
Education： Ph.D., National Taiwan University Research Areas： Email：ksli@narlabs.org.tw |
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Jointly Appointed Professor Kuo-Chung Yee |
Education： UT Austin Ph.D. ME Research Areas： Email：kcyee@tsmc.com |
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