半導體元件部

SEMICONDUCTOR DEVICE
元件技術、材料與物理

The Semiconductor Device Department provides the study of fundamental device physics, the research in advanced device technologies, and the learning of practical novel device design and characterization. This Department intends to cultivate semiconductor device talents for research and development in the academia and the industry in forward looking semiconductor technologies, such as 3D FinFET and GAA CMOS devices; SRAM, DRAM, Flash and the emerging RRAM, MRAM, FeRAM, PCRAM memories; pure Si as well as GaN and SiC compound power devices; MEMS device and system; Sensor and Optical devices. The device TCAD simulation, characterization, and reliability study are embraced for more comprehensive study and characteristic evaluation. In addition, experimental courses in device design and manufacturing employ collaboration with world-class semiconductor companies to provide an up-to-date technology platform for hands-on learning of advanced devices and the exploration of leading-edge technology. 

提供基礎的元件物理研習、先進元件技術之研究、以及新型元件設計和特性的實作訓練。設立半導體元件部旨在為學界及產業界培養半導體元件的研發人才，並提供半導體技術的前瞻性研究，研究主要集中在3D FinFET和GAA CMOS元件、半導體（SRAM、DRAM、Flash）和新興（RRAM、MRAM、FeRAM、PCRAM）記憶體、化合物半導體（GaN和SiC）功率元件、MEMS元件和系統整合、及傳感器。元件之模擬、特性分析、和可靠性研究，也被含括，以提供更全面的元件學習及其特性之評估。此外，元件設計與製造方面的實驗課程亦與世界級的半導體公司合作，為先進元件的動手學習和前瞻技術的探索提供最新的技術平台。

半導體設計部

SEMICONDUCTOR DESIGN
積體電路設計與應用

Design Technology Institute promotes advanced researches in electronic circuit architecture and system that spans the spectrum of analog/mixed-signal, RF and microwave, bio-medical, sensor, memory, digital system, and EDA. Faculties in the institute have demonstrated leadership in various domains including computing in memory, deep learning accelerator and system, hardware security, and quantum algorithm. Novel applications are also developed in close collaboration with leading industry experts. Exemplar systems includes highly-efficient DNN accelerator, bio-mimic fly drone, world-leading ReRAM-based computation engine, and dexterous human-like robotic ARM. Aspiring students are welcomed to join the institute for the highly active and dynamic research environment.

主要推動電子電路架構和系統設計的先進研究，其研究範圍包括了AI硬體及軟體設計、邏輯線路、記憶體、數位電路系統、電子設計自動化、類比混合訊號、射頻微波、和感測器等。半導體設計部師資為該領域之頂尖研究學者，在記憶體內計算，AI加速器系統、硬體安全、和量子計算方面都有重要貢獻。本學院也和業界專家共同開發各種電路設計的新穎應用。半導體設計部的重要研究成果包括了高效率AI加速器、類果蠅飛行無人機、憶阻式記憶體計算元件、和雙手靈巧機器手臂等。歡迎在VLSI設計領域有興趣的同學加入。

半導體材料部

SEMICONDUCTOR MATERIAL
電子材料與化學

To overcome the limitation of Moore’s law, the development of novel semiconductor materials is essential. New functions of semiconductor devices rely heavily on the ultimate utilization of various materials’ characteristics. The National Tsing Hua University has been recognized as one of the strongest institutes on materials research in the world. Our CoSR will strongly link material experts on campus and from the semiconductor industry to provide students a solid background through courses and researches on semiconductor materials, including fundamental material cores, Si-based materials, compound semiconductors, dielectrics, metal contacts, polymers, microstructure and failure analysis, as well as computational materials. Through CoSR’s training, students will be cultivated to be multi-disciplinary materials leaders. 

要突破摩爾定律的限制，開發新型半導體材料是不可缺少的一環。欲彰顯半導體元件的新功能，很大程度上，得要仰仗各種材料特性的巧妙運用。國立清華大學被公認為世界上最頂尖的材料研究機構之一。本學院將緊密結合校內外和產業界的材料專家，透過一系列的課程和研究，為學生提供紮實的半導體材料基礎，包括基礎材料核心、矽基材料、化合物半導體、介電材料、金屬接點材料、高分子、微結構、失效分析、和計算材料等。我們的目標是培養學生成為跨領域的半導體材料領導者。

半導體製程部

SEMICONDUCTOR PROCESS
先進製程、設備與封裝

Semiconductor Manufacturing Process is a major area in which, Taiwan excels over the rest of the world. A thorough understanding of the manufacturing process and the ability to harness the process and metrology equipment to its ultimate limit is extremely important. This CoSR plans to equip the students in Process with the above capabilities in exploiting resolution enhancement techniques in Immersion and EUV lithography, Plasma and Reactive Ion Etch, CVD, PVD, ALD, Electroplating, CMP, Ion Implantation, Diffusion, and Oxidation, Deep learning using Big-data coupled with tools such as Design of Experiment will be covered. Ability to solve problems and to invent new process or equipment are imbedded. Rich internship programs with the collaboration companies are highly encouraged to participate for the students of the Process Department.   

半導體製程技術是台灣在世界半導體的優勢領域，對於製程工藝的透徹理解以及將製程技術和計量設備發揮到極致的能力是非常重要的。本學院將訓練此領域的學生具備以下專業能力，微影原理、解析度增進法、籍微影術操練創意和解決問題、浸潤式微影、EUV微影、電漿和活性離子蝕刻、CVD、PVD、ALD、電鍍、CMP、離子佈植、擴散、和氧化技術。利用大數據、AI、實驗設計等工具來解決問題，開發新製程技術或設備的能力亦將是研究與學習的重點。